Evgeny Yurievich Gusev 

+7(863)-437-17-67

Senior researcher

Institute of Nanotechnologies, Electronics and Equipment Engineering

Associate Professor

Institute of Nanotechnologies, Electronics and Equipment Engineering

Senior researcher

Academy for Engineering and Technologies

E-mail:

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Degree: Candidate of Sciences

Personal page in Russian:

https://sfedu.ru/person/eyugusev

Personal page in English:

https://sfedu.ru/en/person/eyugusev

Research interests:

Plasma technology, electron beam processing, microelectronic and nanoelectronic technology, microsystems technology

Research projects:

Process flows and technology of micro- and nanoelectromechanical systems

Teaching:

• Special sections of Nanotechnology: MEMS
• Micro- and nanosystems technology
• Micro- and Nanotechnologies
• Technologies of MEMS
• Micro- and Nanosystems