Oleg Igorevich Ilin
+7(863) 218-40-00
ext.
30123
+7(863)-437-16-11
Chief designer
Academy for Engineering and Technologies
Senior researcher
Institute of Nanotechnologies, Electronics and Equipment Engineering
Senior researcher
Institute of Nanotechnologies, Electronics and Equipment Engineering
Associate Professor
Institute of Nanotechnologies, Electronics and Equipment Engineering
Research interests:
Nanoelectronics, carbon nanotubes, scanning electron microscopy, nanostructures, electron beam lithography, nanotechnology, chemical vapour deposition
Research projects:
- "Fundamental research in the field of intelligent control systems, navigation and communication", State Building of the Ministry of Education and Science No. 0852-2020-0015, head, 2020-2022.
- "Carbon nanotubes for creating elements of nanopyzotronics", RFBR No. 20-37-70034, head, 2019-2021.
- "Development and creation of energy-efficient sensitive elements of gas sensors based on carbon nanostructures", Russian Science Foundation No. 18-79-00176, head, 2018-2020.
- "Investigation of laws of the effect carbon nanotubes parameters on their adhesive properties for high strength mechanical contacts", 18-32-00652 mol_a, 2018-2020.
- "Development of physical bases of creation of memory devices with controlled deformation in the vertically aligned carbon nanotubes," ofi_m 16-29-14023, 2016-2019.
- "Adhesion structures on the basis of hierarchical tubular nanomaterials", project VnGr-07/2017-26, 2017-2019.
- "Development of models and experimental studies of resistive switching of vertically aligned carbon nanotubes for the creation of promising elements of memory", mol_a 16-37-00101 RFFI, 2016-2017.
- "Development of methods for the design and development of advanced multi-axis integrated micro- and nanomechanical gyroscopes and accelerometers using plasma and laser technologies for surface micromachining mikrooptoelektromehanicheskih systems», CITIS N: 114091540039, 2014 - 2016.
- "Development of construction principles and foundations of the theory of technological processes of creating ordered arrays of quantum nanostructures and molecular nanoelectronic and nanomechanical systems», CITIS N: 1201257796, 2012 - 2014.
- "Development and research of the processes of formation and methods nanodiagnostics memristor structures based on nanocrystalline films of ZnO, vertically aligned carbon nanotubes and titanium oxide nanostructures promising elements for making RRAM», CITIS N: 1201366566, 2013.
- "Investigation of nano-sized surface profiling solids focused ion beam to create nanostructures, nanoelectronics components, micro and nanosistemnoy technology», CITIS N: 1201366567, 2013.
- "Study of electrical properties of nanostructured materials and composites based on them for use in gas sensors sensitive elements», CITIS N: 1201366570, 2013.
- "Research of modes of formation of elements for microfluidics lab-on-chip method of focused ion beams», CITIS N: 1201279518, 2012 - 2013.
- "Development and research of methods of formation of probe sensors for specialized tasks nanodiagnostics probe by focused ion beams», CITIS N: 1201280481, 2012 - 2013.
Teaching:
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Processes of micro- and nanotechnology
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Actual problems of micro- and nanotechnology
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Application packages for engineering calculations
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Information technologies
Download CV (pdf)
