Gusev Evgeniy Yurevich

Institute of Nanotechnologies, Electronics and Equipment Engineering - Associate Professor

E-mail:

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Personal page:

https://sfedu.ru/s7/person/ru/eyugusev

Personal page in english:

https://sfedu.ru/s7/person/en/eyugusev

Research interests:

Plasma technology, electron beam processing, microelectronic and nanoelectronic technology, microsystems technology

Research projects:

Process flows and technology of micro- and nanoelectromechanical systems