Development of deep X-ray lithography masks technology.
Development of interactive remote access multifunctional complex for the students to study nanomaterials.
Research and development of technological procedures for the production of elements of micro-and nano-electronic technology based on the use of ultra-high vacuum technology automated cluster-type platform.
The development of technological bases of submicron surface profiling using focused ion beams to create micro- and nanostructures.
Studying the Resolving Power of Nanosized Profiling Using Focused Ion Beams.
Memristor Effect on Bundles of Vertically Aligned Carbon Nanotubes Tested by Scanning Tunnel Microscopy.
Probe modification for scanning probe microscopy by the focused ion beam method.
Formation of Nanosize Structures on a Silicon Substrate by Method of Focused Ion Beams.
Development of physical and technological principles for the fabrication of probes with controlled geometry for near-field optical microscopy